Multi-dimensional modelling of electrostatic forces between atomic force microscopy tip and dielectric surface

Abstract

In this paper, simulation results for the electrostatic force between an Atomic Force Microscope (AFM) sensor and the surface of a dielectric are presented for different bias voltages on the tip:. The aim is to analyse force-distance curves as AFM detection mode for electrostatic charges. The sensor is composed of a cantilever supporting a conical tip terminated by a spherical apex; the effect of the cantilever is neglected here. Our model of force curve has been developed using the Finite Volume Method. The scheme is based on the Polynomial Reconstruction Operator – PRO-scheme. First results of the computation of electrostatic force for different tip– sample distances, 0 to 600 nm, and for different DC voltage stress applied to the tip, 6 to 25 V, are shown and compared with experimental data in order to validate our approach.