Utilize este identificador para referenciar este registo:
https://hdl.handle.net/1822/4314
Título: | X-rays microdetectors based on an array of scintillators: a maskless process using laser ablation |
Autor(es): | Rocha, J. G. Moreira, M. V. Wolffenbuttel, R. F. Ramos, N. F. Lanceros-Méndez, S. Correia, J. H. |
Palavras-chave: | Scintillator Digital radiology X-ray Laser ablation |
Data: | 2002 |
Editora: | IEEE |
Citação: | SENSORS 2002 - IEEE INTERNATIONAL CONFERENCE ON SENSORS, 1, Orlando - "Interrnational Conference on Sensors : Proceedings". [S.l. : s.n., 2002]. ISBN 0-7803-7454-1. |
Resumo(s): | This paper describes a X-rays microdetector based on an array of wells filled with scintillator crystals. A thick-film of aluminum (500 um) is etched by Laser Ablation Technique (LAT) in order to achieve a square well with side of 100 um and 490 um deep vertical sidewalls. The aluminum thick-film was chosen because it is a good reflector in the visible range and for improving the number of photons collected by each photodetector. Also, the cross-talk between adjacent wells is reduced. As first approach, for a 4x4 wells array prototype, LAT is an inexpensive process when compared with Deep Reactive Ion Etching (DRIE) and avoids the need of etching masks. In this system the X-ray energy is first converted to visible light by the scintillator. This light is then detected by a photodetector fabricated in a standard CMOS process. |
Tipo: | Artigo em ata de conferência |
URI: | https://hdl.handle.net/1822/4314 |
ISBN: | 0-7803-7454-1 |
Arbitragem científica: | yes |
Acesso: | Acesso aberto |
Aparece nas coleções: | DEI - Artigos em atas de congressos internacionais |
Ficheiros deste registo:
Ficheiro | Descrição | Tamanho | Formato | |
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01037158.pdf | 337,12 kB | Adobe PDF | Ver/Abrir |