Utilize este identificador para referenciar este registo:
https://hdl.handle.net/1822/69020
Título: | Clean-Room lithographical processes for the fabrication of Graphene biosensors |
Autor(es): | Cabral, Patrícia D. Domingues, Telma Machado, George Chicharo, Alexandre Cerqueira, M. F. Fernandes, Elisabete Athayde, Emilia Alpuim, P. Borme, Jérôme |
Palavras-chave: | Graphene Microfabrication Biosensors Dielectric passivation Clean surfaces |
Data: | Dez-2020 |
Editora: | MDPI |
Revista: | Materials |
Resumo(s): | This work is on developing clean-room processes for the fabrication of electrolyte-gate graphene field-effect transistors at the wafer scale for biosensing applications. Our fabrication process overcomes two main issues: removing surface residues after graphene patterning and the dielectric passivation of metallic contacts. A graphene residue-free transfer process is achieved by using a pre-transfer, sacrificial metallic mask that protects the entire wafer except the areas around the channel, source, and drain, onto which the graphene film is transferred and later patterned. After the dissolution of the mask, clean gate electrodes are obtained. The multilayer SiO2/SiNx dielectric passivation takes advantage of the excellent adhesion of SiO2 to graphene and the substrate materials and the superior impermeability of SiNx. It hinders native nucleation centers and breaks the propagation of defects through the layers, protecting from prolonged exposition to all common solvents found in biochemistry work, contrary to commonly used polymeric passivation. Since wet etch does not allow the required level of control over the lithographic process, a reactive ion etching process using a sacrificial metallic stopping layer is developed and used for patterning the passivation layer. The process achieves devices with high reproducibility at the wafer scale. |
Tipo: | Artigo |
URI: | https://hdl.handle.net/1822/69020 |
DOI: | 10.3390/ma13245728 |
ISSN: | 1996-1944 |
Versão da editora: | https://www.mdpi.com/1996-1944/13/24/5728/htm |
Arbitragem científica: | yes |
Acesso: | Acesso aberto |
Aparece nas coleções: | CMAT - Artigos em revistas com arbitragem / Papers in peer review journals PHYSICS OF QUANTUM MATERIALS AND BIONANOSTRUCTURES (2018 - ...) CDF - CEP - Artigos/Papers (with refereeing) |
Ficheiros deste registo:
Ficheiro | Descrição | Tamanho | Formato | |
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materials-13-05728-v2.pdf | 7,33 MB | Adobe PDF | Ver/Abrir |
Este trabalho está licenciado sob uma Licença Creative Commons