Utilize este identificador para referenciar este registo:
https://hdl.handle.net/1822/21888
Registo completo
Campo DC | Valor | Idioma |
---|---|---|
dc.contributor.author | Dias, Rosana A. | - |
dc.contributor.author | Wolffenbuttel, R. F. | - |
dc.contributor.author | Cretu, E. | - |
dc.contributor.author | Rocha, Luís A. | - |
dc.date.accessioned | 2012-12-20T14:16:52Z | - |
dc.date.available | 2012-12-20T14:16:52Z | - |
dc.date.issued | 2012-09 | - |
dc.identifier.uri | https://hdl.handle.net/1822/21888 | - |
dc.description.abstract | In this paper we present a method for closed-loop operation of pull-in time accelerometers. Accelerometers based on the measurement of the pull-in time of movable parallel-plates MEMS structures have already demonstrated very good resolution capabilities, with low requirements on the capacitive readout. However, open-loop operation delivers very low dynamic range and highly non-linear response. The closed-loop approach relies on electrostatic feedback using counter-actuation electrodes opposite to the pull-in direction and although the control algorithm used was very simple, the dynamic range has been effectively extended and the linearity improved. | por |
dc.description.sponsorship | Fundação para a Ciência e a Tecnologia (FCT) | por |
dc.language.iso | eng | por |
dc.publisher | Ilmenau University of Technology | por |
dc.rights | restrictedAccess | por |
dc.subject | Pull-In | por |
dc.subject | Accelerometer | por |
dc.subject | Closed-loop | por |
dc.subject | Electrostatic actuation | por |
dc.title | Closed loop operation of time-based accelerometers | por |
dc.type | conferencePaper | - |
dc.peerreviewed | yes | por |
sdum.publicationstatus | published | por |
oaire.citationConferenceDate | 09 - 11 Set. 2012 | por |
sdum.event.type | workshop | por |
oaire.citationStartPage | 1 | por |
oaire.citationEndPage | 4 | por |
oaire.citationConferencePlace | Ilmenau, Alemanha | por |
oaire.citationTitle | 23rd Micromechanics and Microsystems Europe Workshop | por |
sdum.conferencePublication | 23rd Micromechanics and Microsystems Europe Workshop | por |
Aparece nas coleções: | IPC - Resumos alargados em actas de encontros científicos internacionais com arbitragem |
Ficheiros deste registo:
Ficheiro | Descrição | Tamanho | Formato | |
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MME2012.pdf Acesso restrito! | 576,68 kB | Adobe PDF | Ver/Abrir |