Utilize este identificador para referenciar este registo:
https://hdl.handle.net/1822/21888
Título: | Closed loop operation of time-based accelerometers |
Autor(es): | Dias, Rosana A. Wolffenbuttel, R. F. Cretu, E. Rocha, Luís A. |
Palavras-chave: | Pull-In Accelerometer Closed-loop Electrostatic actuation |
Data: | Set-2012 |
Editora: | Ilmenau University of Technology |
Resumo(s): | In this paper we present a method for closed-loop operation of pull-in time accelerometers. Accelerometers based on the measurement of the pull-in time of movable parallel-plates MEMS structures have already demonstrated very good resolution capabilities, with low requirements on the capacitive readout. However, open-loop operation delivers very low dynamic range and highly non-linear response. The closed-loop approach relies on electrostatic feedback using counter-actuation electrodes opposite to the pull-in direction and although the control algorithm used was very simple, the dynamic range has been effectively extended and the linearity improved. |
Tipo: | Artigo em ata de conferência |
URI: | https://hdl.handle.net/1822/21888 |
Arbitragem científica: | yes |
Acesso: | Acesso restrito UMinho |
Aparece nas coleções: | IPC - Resumos alargados em actas de encontros científicos internacionais com arbitragem |
Ficheiros deste registo:
Ficheiro | Descrição | Tamanho | Formato | |
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MME2012.pdf Acesso restrito! | 576,68 kB | Adobe PDF | Ver/Abrir |