Utilize este identificador para referenciar este registo:
https://hdl.handle.net/1822/50706
Título: | Novel magnetic readout for hybrid spintronic MEMS devices |
Autor(es): | Dias, Rosana A. Moreira, Eurico Esteves Ribeiro, Igor Costa, Margaret Fonseca, Helder Cardoso, Susana Freitas, Paulo Rocha, Luís Alexandre Machado Gaspar, João |
Palavras-chave: | Spintronics Magnetic readout MEMS Displacement sensing |
Data: | 2017 |
Editora: | IEEE |
Resumo(s): | This digest reports for the first time on the concept, fabrication and characterization of a spintronics magnetic readout for hybrid MEMS. The method uses magnetic sensors (spin valves) and permanent magnets (on both the movable and the fixed parts of the MEMS structure) to detect displacement. The use of such transduction method has several potential advantages: it allows a small form factor, straightforward readout electronics, xyz integrability, and does not require high aspect ratio silicon gaps, allowing the replacement of conventional capacitive transductors by a mechanism that occupies much less chip area. The proof-of-concept is presented for an in-plane movable structure. Both the full-gap linear displacement and the electrostatic pull-in behavior are monitored and displayed. |
Tipo: | Artigo em ata de conferência |
URI: | https://hdl.handle.net/1822/50706 |
ISBN: | 978-1-5386-2732-7 |
DOI: | 10.1109/TRANSDUCERS.2017.7994174 |
Arbitragem científica: | yes |
Acesso: | Acesso restrito UMinho |
Aparece nas coleções: | DEI - Artigos em atas de congressos internacionais |
Ficheiros deste registo:
Ficheiro | Descrição | Tamanho | Formato | |
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Transducers_RD_17.pdf Acesso restrito! | 1,15 MB | Adobe PDF | Ver/Abrir |