Utilize este identificador para referenciar este registo:
https://hdl.handle.net/1822/60857
Título: | Resonant accelerometer based on double-ended tuning fork and a force amplification mechanism |
Autor(es): | Moreira, Eurico Esteves Kuhlmann, Burkhard Gaspar, João Rocha, Luís Alexandre Machado |
Data: | 13-Nov-2018 |
Editora: | Multidisciplinary Digital Publishing Institute |
Revista: | Proceedings |
Resumo(s): | Resonant accelerometers are an alternative to amplitude modulated devices due to their higher integration capabilities, since they are encapsulated in vacuum and are stable at low pressures. Vacuum is required for some sensors (i.e., gyroscopes) but amplitude modulated accelerometers tend to be unstable under such conditions and therefore cannot be integrated in the same package. Herewith, a device composed by double-ended tuning fork resonators (DETF) and a force amplification mechanism for sensitivity enhancement is presented. Characterization of the fabricated devices was performed, and the design was successfully validated. A sensitivity close to 80 Hz/g was experimentally measured and the DETF characterization for different driving (AC) and bias voltages (DC) is also presented. |
Tipo: | Artigo em ata de conferência |
URI: | https://hdl.handle.net/1822/60857 |
DOI: | 10.3390/proceedings2131030 |
ISSN: | 2504-3900 |
Arbitragem científica: | yes |
Acesso: | Acesso aberto |
Aparece nas coleções: |
Ficheiros deste registo:
Ficheiro | Descrição | Tamanho | Formato | |
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proceedings-02-01030.pdf | 1,06 MB | Adobe PDF | Ver/Abrir |
Este trabalho está licenciado sob uma Licença Creative Commons