Utilize este identificador para referenciar este registo:
https://hdl.handle.net/1822/14656
Registo completo
Campo DC | Valor | Idioma |
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dc.contributor.author | Dias, R. A. | - |
dc.contributor.author | Mol, L. | - |
dc.contributor.author | Wolffenbuttel, R. F. | - |
dc.contributor.author | Cretu, E. | - |
dc.contributor.author | Rocha, Luís A. | - |
dc.date.accessioned | 2011-11-29T17:19:38Z | - |
dc.date.available | 2011-11-29T17:19:38Z | - |
dc.date.issued | 2011-08 | - |
dc.identifier.issn | 1530-437X | por |
dc.identifier.uri | https://hdl.handle.net/1822/14656 | - |
dc.description.abstract | Closed-loop pull-in time operated devices are a good alternative for high sensitivity accelerometers. This paper proposes the use of time measurement as the transduction mechanism for the realization of a high-precision accelerometer. The key feature is the existence of a metastable region that dominates pull-in behavior, thus making pull-in time very sensitive to external accelerations. The main design challenges for a pull-in time parallel-plate capacitive Microelectromechanical system (MEMS) accelerometer are related to the damping and the associated tradeoff between sensitivity and noise is discussed. Parallel-plate MEMS structures designed and fabricated in a 25 um-thick SOI micromachining process (SOIMUMPS) are used to demonstrate the accelerometer time-based approach and experimental results demonstrate a sensitivityof 0.25 us/ ug. | por |
dc.description.sponsorship | Fundação para a Ciência e a Tecnologia (FCT) | por |
dc.description.sponsorship | ADI - Agência de Inovação | por |
dc.language.iso | eng | por |
dc.publisher | IEEE | por |
dc.rights | restrictedAccess | por |
dc.subject | Squeeze-film damping | por |
dc.subject | Pull-in time | por |
dc.subject | Microelectromechanical systems (MEMS) design | por |
dc.subject | Microsystems | por |
dc.subject | mu g accelerometer | por |
dc.subject | µg accelerometer | por |
dc.title | Design of a time-based micro-g accelerometer | por |
dc.type | article | - |
dc.peerreviewed | yes | por |
dc.relation.publisherversion | http://ieeexplore.ieee.org/ | por |
sdum.publicationstatus | published | por |
oaire.citationStartPage | 1677 | por |
oaire.citationEndPage | 1683 | por |
oaire.citationIssue | 8 | por |
oaire.citationTitle | IEEE Sensors Journal | por |
oaire.citationVolume | 11 | por |
dc.identifier.doi | 10.1109/JSEN.2010.2103938 | por |
dc.subject.wos | Science & Technology | por |
sdum.journal | IEEE Sensors Journal | por |
Aparece nas coleções: | IPC - Artigos em revistas científicas internacionais com arbitragem |
Ficheiros deste registo:
Ficheiro | Descrição | Tamanho | Formato | |
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IEEESensors.pdf Acesso restrito! | 1,61 MB | Adobe PDF | Ver/Abrir |