Utilize este identificador para referenciar este registo:
https://hdl.handle.net/1822/27347
Título: | Piezoresistor sensor fabrication by direct laser writing on hydrogenated amorphous silicon |
Autor(es): | Alpuim, P. Cerqueira, M. F. Noh, J. Gaspar, J. Borme, J. |
Palavras-chave: | Laser crystallization Nanocrystalline silicon Flexible electronics Direct laser write chemical vapor deposition (CVD) (deposition) laser annealing Raman spectroscopy |
Data: | 2014 |
Editora: | Cambridge University Press |
Revista: | Journal of Management and Organization |
Resumo(s): | In this paper we report on the 532 nm Nd:YAG laser-induced crystallization of 10 nm thick boron-doped hydrogenated amorphous silicon thin films deposited on flexible polyimide and on rigid oxidized silicon wafers by hot-wire chemical vapor deposition. The dark conductivity increased from ~10-7 -1cm-1, in the as-deposited films, to ~10 and 50 -1cm-1 after laser irradiation, on rigid and flexible substrates, respectively. Depending on type of substrate, laser power and fluence, a Raman crystalline fraction between 55 and 90% was measured in HWCVD films, which was higher than observed in rf-PECVD films (35 - 55%). Crystallite size remained small in all cases, in the range 6-8 nm. Due to a very high conductivity contrast (>7 orders of magnitude) between amorphous and crystallized regions, it was possible to define conductive paths in the a-Si:H matrix, by mounting the sample on a X-Y software-controlled movable stage under the laser beam, with no need for the usual lithography steps. The resistors scribed by direct laser writing had piezoresistive properties, with positive gauge factor ~1. The details of the laser interaction process with the Si film were revealed by scanning electron microscopy imaging. |
Tipo: | Artigo |
URI: | https://hdl.handle.net/1822/27347 |
DOI: | 10.1557/opl.2014.296 |
ISSN: | 1833-3672 |
Arbitragem científica: | yes |
Acesso: | Acesso aberto |
Aparece nas coleções: | CDF - CEP - Comunicações/Communications (with refereeing) |
Ficheiros deste registo:
Ficheiro | Descrição | Tamanho | Formato | |
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JSAP-MRS proceedings_Alpuim et al_.pdf | pdf do documento principal | 716,33 kB | Adobe PDF | Ver/Abrir |