Single-chip CMOS optical microspectrometer

Abstract

Numerous applications, e.g., systems for chemical analysis by optical absorption and emission line characterization, will benefit from the availability of low-cost single-chip spectrometers. A single-chip CMOS optical microspectrometer containing an array of 16 addressable Fabry–Perot etalons (each one with different resonance cavity length), photodetectors and circuits for read-out, multiplexing and driving a serial bus interface has been fabricated. The result is a chip that can operate using only four external connections (including Vdd and Vss). covering the visible spectral range of the spectrum with FWHM = 18 nm. Frequency output and serial bus interface allow easy multi-sensor, multi-chip interfacing using a microcontroller or a personal computer. Power consumption is 1250 µW for a clock frequency of 1 MHz