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https://hdl.handle.net/1822/84557
Título: | Radio-frequency magnetron sputtering deposition process for In2O3:H transparent conductive oxide films for application in Cu(In,Ga)Se2 solar cells |
Autor(es): | Alves, Marina Brito, Daniel Carneiro, Joaquim A. O. Teixeira, Vasco M. P. Sadewasser, Sascha |
Palavras-chave: | Indium oxide Hydrogen-doped indium oxide Sputtering Transparent conductive oxide Sheet resistance |
Data: | 6-Abr-2023 |
Editora: | Elsevier 1 |
Revista: | Thin Solid Films |
Citação: | Alves, M., Brito, D., Carneiro, J., Teixeira, V., & Sadewasser, S. (2023, June). Radio-frequency magnetron sputtering deposition process for In2O3:H transparent conductive oxide films for application in Cu(In,Ga)Se2 solar cells. Thin Solid Films. Elsevier BV. http://doi.org/10.1016/j.tsf.2023.139840 |
Resumo(s): | Typical Cu(In,Ga)Se2 solar cells are deposited on an opaque molybdenum back contact. However, for applications such as bifacial, semi-transparent or tandem solar cells a transparent back contact is required, for which various transparent conductive oxides have been tested, such as indium- or fluorine-doped tin oxide, and hydrogen-doped indium oxide. Here, a radio-frequency magnetron sputtering deposition process for In2O3:H (IOH) is investigated, where H is supplied from a Ar/H2 (5%) mixed gas and oxygen is pulsed during the entire deposition at room temperature. After deposition, the films are post-annealed in vacuum to optimize their optoelectronic properties. The oxygen plays an important role for the optoelectronic properties, where a high content of oxygen allows higher transparency but also increases the film sheet resistance. Optimum oxygen and Ar/H2 partial pressures of 3.2 E-2 Pa and 13E-2 Pa, respectively, were found, producing IOH films with average visible transparency of 87% and sheet resistance after annealing of 19 Ohm/sq. |
Tipo: | Artigo |
URI: | https://hdl.handle.net/1822/84557 |
DOI: | 10.1016/j.tsf.2023.139840 |
ISSN: | 0040-6090 |
e-ISSN: | 1879-2731 |
Versão da editora: | https://www.sciencedirect.com/science/article/pii/S0040609023001700 |
Arbitragem científica: | yes |
Acesso: | Acesso aberto |
Aparece nas coleções: |
Ficheiros deste registo:
Ficheiro | Descrição | Tamanho | Formato | |
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versão draft_1-s2.0-S0040609023001700-main.pdf | 1,18 MB | Adobe PDF | Ver/Abrir |