Application of microsystems technology in the fabrication of thermoelectric micro-converters

Abstract

The use of thin-film deposition techniques with microsystems technologies renewed the interest in the thermoelectricity in the last years. Integration of efficient solid-state thermoelectric (TE) microdevices with microelectronics is desirable for local cooling and, since they can be used to stabilise the temperature of devices, decrease noise levels and increase operation speed. Their use in thermoelectric microgeneration (energy harvesting) can also supply energy to low power consumption electronic devices. In this chapter, the fabrication of thermoelectric microconverters is compared, both on materials from thin-film composites to supperlattice structures, and on its fabrication techniques.