Optical microsystems in silicon based on a fabry-perot resonance cavity

Abstract

This thesis discusses the theory, design and realization of two different types of microspectrometers - the scanning type and array type - for application in the visible part of the spectrum. Furthermore, a fully integrated optical microsystem based on a sixteen-channels array-type configuration, with electronic circuitry on-chip (readout electronics for the photodetectors, light-frequency converter and a bus interface) is presented.