Utilize este identificador para referenciar este registo:
https://hdl.handle.net/1822/75457
Título: | Multifunctional hard coatings based on CrNx for temperature sensing applications |
Autor(es): | Ferreira, Armando José Barros Correa, Marcio A. Silva, João Paulo Correia, Daniela Lanceros-Méndez, S. Vaz, F. |
Palavras-chave: | Multifunctional hard coatings DC sputtering Temperature Coefficient of Resistance Thermal properties Temperature sensing |
Data: | 2021 |
Editora: | Elsevier 1 |
Revista: | Sensors and Actuators A: Physical |
Citação: | Ferreira, A., Correa, M. A., Silva, J. P., Correia, D., Lanceros-Mendez, S., & Vaz, F. (2021). Multifunctional hard coatings based on CrNx for temperature sensing applications. Sensors and Actuators A: Physical, 329, 112794. doi: https://doi.org/10.1016/j.sna.2021.112794 |
Resumo(s): | This paper presents reports on the preparation of a multifunctional coating system, CrNx, with temperature sensing capability. A systematic study of the thermo-resistive effect of chromium nitride (CrNx) thin films with a negative temperature coefficient of resistance (TCR) has been carried out. The CrNx nanostructures were grown by reactive magnetron sputtering under distinct Ar+N2 conditions. To confer a zigzag columnar morphology to the CrNx we explored the oblique angle deposition technique. The structural properties have been studied through X-ray diffraction and Scanning Electron Microscopy. The thermo-resistive response was evaluated by measuring the electrical resistivity as a function of temperature by the twopoint method. The results observed for the CrNx films produced with N2 flux between 4 and 8 sccm present an stable and negative TCR. Values of -9.1710-4 , -5.3110-3 , and -1.47610-2 were observed for the films grown with 4, 6, and 8 sccm, respectively. The grain-boundary was used to theoretically describe our results. The results open new technological possibilities for the application of CrNx coatings for esistive temperature detector (RTD) systems. |
Tipo: | Artigo |
URI: | https://hdl.handle.net/1822/75457 |
DOI: | 10.1016/j.sna.2021.112794 |
ISSN: | 0924-4247 |
Versão da editora: | https://www.sciencedirect.com/science/article/pii/S0924424721002570 |
Arbitragem científica: | yes |
Acesso: | Acesso restrito UMinho |
Aparece nas coleções: |
Ficheiros deste registo:
Ficheiro | Descrição | Tamanho | Formato | |
---|---|---|---|---|
15.pdf Acesso restrito! | 670,59 kB | Adobe PDF | Ver/Abrir |