Utilize este identificador para referenciar este registo:
https://hdl.handle.net/1822/14656
Título: | Design of a time-based micro-g accelerometer |
Autor(es): | Dias, R. A. Mol, L. Wolffenbuttel, R. F. Cretu, E. Rocha, Luís A. |
Palavras-chave: | Squeeze-film damping Pull-in time Microelectromechanical systems (MEMS) design Microsystems mu g accelerometer µg accelerometer |
Data: | Ago-2011 |
Editora: | IEEE |
Revista: | IEEE Sensors Journal |
Resumo(s): | Closed-loop pull-in time operated devices are a good alternative for high sensitivity accelerometers. This paper proposes the use of time measurement as the transduction mechanism for the realization of a high-precision accelerometer. The key feature is the existence of a metastable region that dominates pull-in behavior, thus making pull-in time very sensitive to external accelerations. The main design challenges for a pull-in time parallel-plate capacitive Microelectromechanical system (MEMS) accelerometer are related to the damping and the associated tradeoff between sensitivity and noise is discussed. Parallel-plate MEMS structures designed and fabricated in a 25 um-thick SOI micromachining process (SOIMUMPS) are used to demonstrate the accelerometer time-based approach and experimental results demonstrate a sensitivityof 0.25 us/ ug. |
Tipo: | Artigo |
URI: | https://hdl.handle.net/1822/14656 |
DOI: | 10.1109/JSEN.2010.2103938 |
ISSN: | 1530-437X |
Versão da editora: | http://ieeexplore.ieee.org/ |
Arbitragem científica: | yes |
Acesso: | Acesso restrito UMinho |
Aparece nas coleções: | IPC - Artigos em revistas científicas internacionais com arbitragem |
Ficheiros deste registo:
Ficheiro | Descrição | Tamanho | Formato | |
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IEEESensors.pdf Acesso restrito! | 1,61 MB | Adobe PDF | Ver/Abrir |