Utilize este identificador para referenciar este registo:
https://hdl.handle.net/1822/8389| Título: | On-chip array of thermoelectric peltier microcoolers |
| Autor(es): | Gonçalves, L. M. Rocha, J. G. Couto, C. Alpuim, P. Correia, J. H. |
| Palavras-chave: | Telluride peltier Array telluride peltier microcooler array |
| Data: | 2007 |
| Editora: | IEEE |
| Citação: | INTERNATIONAL CONFERENCE ON SOLID STATE SENSORS, ACTUACTORS AND MICROSYSTEMS,14, Lyon, 2007 – “International Conference on Solid-State Sensors, Actuators and Microsystems”. [S.l. : s.n., 2007]. |
| Resumo(s): | This article reports on the theoretical modelling, the Finite Element Modelling (FEM) simulation, the fabrication process and preliminary results of the first on-chip thermoelectric microcooler array (64 pixels arranged in a 88 array), with each pixel independently controlled. This microcooler array uses co-evaporated V–VI compounds of Bi2Te3 and Sb2Te3 as thermoelectric layers, and can be fabricated using planar thin-film technology, lithography and wet etching on top of a silicon wafer, where the CMOS electronic circuits were previously made |
| Tipo: | Artigo em ata de conferência |
| URI: | https://hdl.handle.net/1822/8389 |
| ISBN: | 9781424408412 |
| DOI: | 10.1109/SENSOR.2007.4300599 |
| Arbitragem científica: | yes |
| Acesso: | Acesso aberto |
| Aparece nas coleções: | DEI - Artigos em atas de congressos internacionais |
Ficheiros deste registo:
| Ficheiro | Descrição | Tamanho | Formato | |
|---|---|---|---|---|
| LM_Goncalves_TRANS07_Paper_Published.pdf | 601,45 kB | Adobe PDF | Ver/Abrir |
