Double sheaths in RF discharges

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dc.contributor.authorMarques, L.
dc.contributor.authorGousset, G.
dc.contributor.authorAlves, L. L.
dc.date.accessioned2005-09-22T15:30:39Z
dc.date.available2005-09-22T15:30:39Z
dc.date.issued2005-04
dc.description.abstractThis paper analyzes the formation of double spacecharge sheaths, associated to the development of double ionization structures in radio frequency discharges. A simulation tool is used to generate space-time images of the ionization rate in hydrogen and in helium, obtained by inducing artificial modifications in the mobility of charged particles, with these gaseseng
dc.distributioninternationaleng
dc.identifier.citation"IEEE Transactions on Plasma Science". ISSN 0093-3813. 33:2 pt. 1 (2005) 358-359.eng
dc.identifier.doi10.1109/TPS.2005.845130por
dc.identifier.issn0093-3813eng
dc.identifier.urihttps://hdl.handle.net/1822/3014
dc.language.isoengeng
dc.peerreviewedyeseng
dc.publisherIEEEeng
dc.relation.publisherversionhttp://ieeexplore.ieee.org/iel5/27/30692/01420475.pdf?tp=&arnumber=1420475&isnumber=30692eng
dc.rightsopenAccesseng
dc.subjectDischarge modelingeng
dc.subjectPlasma sheathseng
dc.subjectRadio frequency dischargeseng
dc.subjectfield inversionpor
dc.subjectheliumpor
dc.subjecthydrogenpor
dc.subjectradio frequency (RF) dischargespor
dc.subject.wosScience & Technologypor
dc.titleDouble sheaths in RF dischargeseng
dc.typearticleeng
dspace.entity.typePublicationen
oaire.citationEndPage359por
oaire.citationIssue2por
oaire.citationStartPage358por
oaire.citationVolume33por
sdum.journalIEEE Transactions on Plasma Sciencepor
sdum.number1eng
sdum.pagination358-359eng
sdum.publicationstatuspublishedeng
sdum.volume33eng

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