X-ray detector based on a bulk micromachined photodiode combined with a scintillating crystal

Abstract

This paper reports the design, fabrication, assembly and testing of a x-ray detector based on a bulk micromachined photodiode (BMMPD) with a cavity filled with a scintillating crystal. The x-ray photons that reach the detector are first converted to visible light by the scintillating crystal. The visible light is then detected by the BMMPD, producing an electric current with value proportional to the incident x-ray intensity. Tests were performed using two x-ray setups: an experimental one and a professional one. The first was powered with a maximum voltage of 35kV, and a current ranging to 1mA and the second was powered with voltages from 40kV to 60kV and currents ranging from 10mA to 55mA.